To start up in safe mode on a Mac with Apple silicon, you need to follow these steps1:
* Shut down your Mac, then press and hold the power button for three seconds.
* When the startup options window appears, select your startup disk.
* Click the Continue in Safe Mode button.
* Log in to your Mac.
Safe mode can help you identify whether issues you're experiencing are caused by software that loads as your Mac starts up. It prevents your Mac from loading certain items, performs a First Aid check on your startup disk, and deletes some caches1. You can verify that your Mac started up in safe mode by using the System Information app1.
The other options are incorrect because they either do not show the Continue in Safe Mode button, or they do not use the correct key combination or timing to enter safe mode.
References: 1: Start up your Mac in safe mode - Apple Support.